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Proceedings of the First International Symposium on Semiconductor Wafer Bonding--Science, Technology, and Applications / edited by Ulrich Gösele ... [et al. ; sponsored by the] Electronics and Dielectric Science and Technology Divisions

資料種別:

図書

出版情報:

Pennington, NJ : Electrochemical Society, c1992

形態:

ix, 498 p. ; 23 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 92-7 <BA01323290>

著者名:

ISBN:

9781566770088 [1566770084]

書誌ID:

BA14412564

子書誌情報

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書誌詳細

その他の標題:	Semiconductor wafer bonding: science, technology, and applications
注記:	Symposium held in Phoenix, Ariz., Oct. 13-18, 1991 Includes bibliographical references and indexes
言語:	英語

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