Ion implantation in semiconductors : proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects, May 24-28, 1971, Garmisch-Partenkirchen, Bavaria, Germany | 東京工業大学附属図書館蔵書検索

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Ion implantation in semiconductors : proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects, May 24-28, 1971, Garmisch-Partenkirchen, Bavaria, Germany / Edited by I. Ruge and J. Graul

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図書

出版情報:

Berlin ; New York : Springer-Verlag, 1971

形態:

506 p. ; 26 cm

著者名:

ISBN:

9783540056669 [3540056661] (: gw)
9780387056661 [0387056661] (: us)

書誌ID:

BA17111112

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書誌詳細

注記:	Includes bibliographical references
主題:	Ion implantation--Congresses; Semiconductors--Congresses
言語:	英語

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