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Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A. / editors, S. Ashok ... [et al.]

資料種別:
図書
出版情報:
Pittsburgh, Pa. : Materials Research Society, c1992
形態:
xix, 1144 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 262 <BA00013775>
著者名:
ISBN:
9781558991576 [1558991573]
書誌ID:
BA18823516
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