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Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A. / editors, Avishay Katz ... [et al.]

資料種別:
図書
出版情報:
Pittsburgh, Pa. : Materials Research Society, c1992
形態:
xvii, 965 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 260 <BA00013775>
著者名:
Katz, Avishay <DA05347504>  
ISBN:
9781558991552 [1558991557]
書誌ID:
BA19373517
子書誌情報
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