Smart materials fabrication and materials for micro-elctro-mechanical systems : symposium held April 28-30, 1992, San Francisco, California, U.S.A. | 東京工業大学附属図書館蔵書検索

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Smart materials fabrication and materials for micro-elctro-mechanical systems : symposium held April 28-30, 1992, San Francisco, California, U.S.A. / editors, A. Peter Jardine ... [et al.]

資料種別:: 図書
出版情報:: Philadelphia, Pa. : Materials Research Society, c1992
形態:: xi, 317 p. ; 24 cm
シリーズ名:: Materials Research Society symposium proceedings ; v. 276 <BA00013775>
著者名:: Jardine, A. Peter <DA07155537>
ISBN:: 9781558991712 [1558991719]
書誌ID:: BA19373889

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注記:	Includes bibliographical references and indexes
主題:	Electromechanical devices--Materials--Congresses; Microelectronics--Materials--Congresses; Smart materials--Congresses
言語:	英語

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