所蔵情報QRコード
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing I / edited by Dennis N. Schmidt, assistant editors, David Reedy, Alex Schwarz ; Electronics and Dielectric Science and Technology Divisions
- 資料種別:
- 図書
- 出版情報:
- Pennington, N.J. : Electrochemical Society, c1992
- 形態:
- x, 501 p. ; 23 cm
- シリーズ名:
- Proceedings / [Electrochemical Society] ; v. 92-21 <BA01323290>
- 著者名:
- ISBN:
- 9781566770224 [156677022X]
- 書誌ID:
- BA19556991
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