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Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : Fort Lauderdale, Florida, February 7-10, 1993 / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division

資料種別:
図書
出版情報:
Piscataway : IEEE Service Center, c1993
形態:
xvii, 294 p. ; 28 cm
著者名:
ISBN:
9780780309579 [078030957X] (: soft.)
9780780309586 [0780309588] (: case.)
9780780309593 [0780309596] (: micro.)
書誌ID:
BA20290847
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