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Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices / edited by Orlando Auciello and Jürgen Engemann

資料種別:
図書
出版情報:
Dordrecht ; Boston : Kluwer, c1993
形態:
xv, 633 p. ; 25 cm
シリーズ名:
NATO ASI series ; ser. E . Applied sciences ; v. 234 <BA00020624>
著者名:
ISBN:
9780792322658 [0792322657]
書誌ID:
BA20386017
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