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Semiconductor measurement technology : spreading resistance symposium : proceedings of a symposium, held at the National Bureau of Standards, Gaithersburg, Md., June 13-14, 1974 / James R. Ehrstein, editor

資料種別:
図書
出版情報:
Washington : U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1974
形態:
ix, 281 p. ; 27 cm
シリーズ名:
ASTM special technical publication ; 572 <BA00068096>
NBS special publication ; 400-10 <BA0011083X>
著者名:
書誌ID:
BA20527833
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