Silicon-on-insulator : its technology and applications

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Silicon-on-insulator : its technology and applications / edited by S. Furukawa

資料種別:

図書

出版情報:

Tokyo : KTK Scientific Publishers
Boston : D. Reidel
Hingham, MA : Sold and distributed in the U.S.A. and Canada by Kluwer Academic Publishers, 1985

形態:

viii, 295 p. ; 24 cm

著者名:

ISBN:

9789027719409 [9027719403]

書誌ID:

BA21045157

子書誌情報

フルテキスト

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書誌詳細

注記:	"Papers presented during the US-Japan Seminar on 'Solid Phase Epitaxy and Interface Kinetics' held in Oiso, Japan, June 20-24, 1983 ... co-sponsored by National Science Foundation and Japan Society for the Promotion of Science"--P. 5 Companion volume containing the other papers presented at seminar published under title: Layered structures and interface kinetics "ASST, advances in solid state technology"--Cover Includes bibliographical references and index
著者名ヨミ:	フルカワ, セイジロウニホンガクジュツシンコウカイ
主題:	Epitaxy--Congresses; Integrated circuits--Design and construction--Congresses; Silicon--Congresses; Silicon-on-insulator technology; Solid state electronics--Congresses
言語:	英語

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