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Proceedings of the Symposia on Interconnects, Contact Metallization, and Multilevel Metallization and Reliability for Semiconductor Devices, Interconnects, amd Thin Insulator Materials / edited by T.O. Herndon, H.S. Rathore ... [et al.] ; [sponsored by the] Dielectric Sicence and Technology and Electronics Divisions

資料種別:
図書
出版情報:
Pennington, NJ : Electrochemical Society, c1993
形態:
xiii, 494 p. ; 23 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 93-25 <BA01323290>
著者名:
Symposium on Interconnects, Contact Metallization, and Multilevel Metallization
Symposium on Reliability for Semiconductor Devices, Interconnects, and Thin Insulator
Herndon, T. O.
Rathore, H. S.
Electrochemical Society. Dielectric Science and Technology Division <DA06421624>
Electrochemical Society. Electronics Division <DA0357072X>
さらに 1 件
ISBN:
9781566770675 [156677067X]
書誌ID:
BA21695367
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