Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies / edited by M. Gentili, C. Giovannella, and S. Selci
- 資料種別:
- 図書
- 出版情報:
- Dordrecht ; Boston : Kluwer Academic Publishers, 1994
- 形態:
- xii, 215 p. ; 25 cm
- シリーズ名:
- NATO ASI series ; ser. E . Applied sciences ; v. 264 <BA00020624>
- 著者名:
- ISBN:
- 9780792327943 [0792327942]
- 書誌ID:
- BA22470329
類似資料:
Plenum Press |
D. Reidel, Sold and distributed in the U.S.A. and Canada by Kluwer Academic Publishers |
Plenum Press |
Plenum Press |
Kluwer Academic Publishers |
Plenum Press |
Kluwer Academic |
M. Nijhoff, Distributors for the U.S. and Canada, Kluwer Boston |
Kluwer Academic |
D. Reidel Pub. Co. |
Plenum Press |