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Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies / edited by M. Gentili, C. Giovannella, and S. Selci

資料種別:
図書
出版情報:
Dordrecht ; Boston : Kluwer Academic Publishers, 1994
形態:
xii, 215 p. ; 25 cm
シリーズ名:
NATO ASI series ; ser. E . Applied sciences ; v. 264 <BA00020624>
著者名:
ISBN:
9780792327943 [0792327942]
書誌ID:
BA22470329
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