IEEE/SEMI International Semiconductor Manufacturing Science Symposium, July 19-20, 1993, San Francisco, CA USA

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IEEE/SEMI International Semiconductor Manufacturing Science Symposium, July 19-20, 1993, San Francisco, CA USA / IEEE/SEMI International Semiconductor Manufacturing Science Symposium ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International

資料種別:

図書

出版情報:

Piscataway, NJ, USA : IEEE Service Center, c1993

形態:

152 p. ; 28 cm

著者名:

ISBN:

9780780312128 [0780312120] (: soft.)
9780780312135 [0780312139] (: case.)
9780780312142 [0780312147] (: micro.)

書誌ID:

BA22515595

子書誌情報

フルテキスト

所蔵情報

他の版・巻

書誌詳細

その他の標題:	93CH32805
注記:	Includes bibliographical references "IEEE catalog number 93CH3280-5"--T.p. verso
主題:	Computer integrated manufacturing systems--Congresses; Electronic industries--Congresses; Semiconductors--Design and construction--Congresses
言語:	英語

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