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Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : Oiso, Japan, January 25-28, 1994 / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center

資料種別:
図書
出版情報:
Piscataway : IEEE Service Center, c1994
形態:
xiv, 360 p. ; 28 cm
著者名:
ISBN:
9780780318335 [0780318331] (: soft.)
9780780318342 [078031834X] (: case.)
9780780318359 [0780318358] (: micro.)
書誌ID:
BA23023993
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