Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A. | 東京科学大学図書館　蔵書検索（大岡山図書館、すずかけ台図書館）

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Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A. / editors, T.J. Mountziaris ... [et al.]

資料種別:

図書

出版情報:

Pittsburgh, PA : Materials Research Society, c1994

形態:

xv, 556 p. ; 24 cm

シリーズ名:

Materials Research Society symposium proceedings ; v. 334 <BA00013775>

著者名:

ISBN:

9781558992337 [1558992332]

書誌ID:

BA23154765

子書誌情報

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書誌詳細

注記:	Sponsors: Army Research Office, Office of Naval Research Includes bibliographical references and index
主題:	Electronic materials--Surfaces--Congresses; Surface chemistry--Congresses
言語:	英語

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