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Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A. / editors, T.J. Mountziaris ... [et al.]

資料種別:
図書
出版情報:
Pittsburgh, PA : Materials Research Society, c1994
形態:
xv, 556 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 334 <BA00013775>
著者名:
ISBN:
9781558992337 [1558992332]
書誌ID:
BA23154765
子書誌情報
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