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Proceedings of the tenth symposium on plasma processing / edited by G.S. Mathad, D.W. Hess ; [sponsored by] Dielectric Science and Technology and electronics Divisions, the Electrochemical Society

資料種別:

図書

出版情報:

Pennington, NJ : the Electrochemical Society, Inc., c1994

形態:

xi, 606 p. ; 23 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 94-20 <BA01323290>

著者名:

ISBN:

9781566770774 [1566770777]

書誌ID:

BA23496328

子書誌情報

フルテキスト

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書誌詳細

注記:	Includes bibliographical references and index
言語:	英語

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