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Proceedings of the tenth symposium on plasma processing / edited by G.S. Mathad, D.W. Hess ; [sponsored by] Dielectric Science and Technology and electronics Divisions, the Electrochemical Society

資料種別:
図書
出版情報:
Pennington, NJ : the Electrochemical Society, Inc., c1994
形態:
xi, 606 p. ; 23 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 94-20 <BA01323290>
著者名:
ISBN:
9781566770774 [1566770777]
書誌ID:
BA23496328
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