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Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films / editors, V.J. Kapoor, W.D. Brown ; Dielectric Science and Technology and Electronics Divisions

資料種別:
図書
出版情報:
Pennington, NJ : Electrochemical Society, c1994
形態:
xiii, 625 p. ; 23 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 94-16 <BA01323290>
著者名:
ISBN:
9781566770484 [1566770483]
書誌ID:
BA23818650
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