Semiconductor microlithography V

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Semiconductor microlithography V / Jim Dey, editor ; presented by the Society of Photo-optical Instrumentation Engineers in cooperation with the Northern California Microphotomask/Masking Working Group and the International Society for Hybrid Microelectronics

資料種別:

図書

出版情報:

Bellingham, Wash. : S.P.I.E.-- Society of Photo-optical Instrumentation Engineers, c1980

形態:

viii, 204 p. ; 28 cm

シリーズ名:

Proceedings of the Society of Photo-Optical Instrumentation Engineers ; v. 221 <BA0118856X>

著者名:

ISBN:

9780892522507 [089252250X] (pbk.)

書誌ID:

BA23910959

子書誌情報

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書誌詳細

注記:	March 17-18, 1980, San Jose, California Includes bibliographical references and indexes
主題:	Microlithography--Congresses; Semiconductors--Congresses
言語:	英語

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