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Precision surface metrology : August 23-24, 1983, San Diego, California / chairman/editor: James C. Wyant

資料種別:
図書
出版情報:
Bellingham, Wash., USA : S.P.I.E.-- International Society for Optical Engineering, c1983
形態:
vi, 207 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 429 <BA0022700X>
著者名:
ISBN:
9780892524648 [0892524642] (pbk.)
書誌ID:
BA23959801
子書誌情報
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