X-ray lithography and applications of soft x-rays to technology : October 19-20, 1983, Upton, New York

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X-ray lithography and applications of soft x-rays to technology : October 19-20, 1983, Upton, New York / Alan D. Wilson, chairman/editor ; cosponsors, National Synchrotron Light Source/Brookhaven National Laboratory, SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash., USA : S.P.I.E.-- International Society for Optical Engineering, 1984

形態:

vi, 140 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 448 <BA0022700X>

著者名:

ISBN:

9780892524839 [0892524839] (pbk.)

書誌ID:

BA23963864

子書誌情報

フルテキスト

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書誌詳細

注記:	Includes bibliographies and index
主題:	X-ray lithography--Congresses; X-rays--Industrial applications--Congresses
言語:	英語

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