Advanced semiconductor processing and characterization of electronic and optical materials : January 24-25, 1984, Los Angeles, California

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Advanced semiconductor processing and characterization of electronic and optical materials : January 24-25, 1984, Los Angeles, California / chairmen/editors: Devendra K. Sadana, Carl M. Lampert ; cooperating organizations: American Vacuum Society, Electronic Materials and Process Division

資料種別:

図書

出版情報:

Bellingham, Wash., USA : S.P.I.E.-- International Society for Optical Engineering, c1984

形態:

vi, 147 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 463 <BA0022700X>

著者名:

ISBN:

9780892524983 [0892524987] (pbk.)

書誌ID:

BA23969135

子書誌情報

フルテキスト

所蔵情報

他の版・巻

書誌詳細

注記:	Includes bibliographies and index
主題:	Semiconductors--Congresses
言語:	英語

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