Optical microlithography III : technology for the next decade : March 14-15, 1984, Santa Clara, California / chairman/editor: Harry L. Stover
- 資料種別:
- 図書
- 出版情報:
- Bellingham, Wash., USA : S.P.I.E.-- International Society for Optical Engineering, c1984
- 形態:
- vi, 269 p. ; 28 cm
- シリーズ名:
- Proceedings / SPIE -- the International Society for Optical Engineering ; v. 470 <BA0022700X>
- 著者名:
- ISBN:
- 9780892525058 [0892525053] (pbk.)
- 書誌ID:
- BA23981560
類似資料:
SPIE--the International Society for Optical Engineering | |
SPIE--the International Society for Optical Engineering | |
SPIE--the International Society for Optical Engineering | |
SPIE--the International Society for Optical Engineering | |