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Optical microlithography III : technology for the next decade : March 14-15, 1984, Santa Clara, California / chairman/editor: Harry L. Stover

資料種別:
図書
出版情報:
Bellingham, Wash., USA : S.P.I.E.-- International Society for Optical Engineering, c1984
形態:
vi, 269 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 470 <BA0022700X>
著者名:
ISBN:
9780892525058 [0892525053] (pbk.)
書誌ID:
BA23981560
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