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Advanced applications of ion implantation : January 23-25, 1985, Los Angeles, California / Michael I. Current, Devendra K. Sadana, chairmen/editors

資料種別:
図書
出版情報:
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1985
形態:
vi, 263 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 530 <BA0022700X>
著者名:
ISBN:
9780892525652 [0892525657] (pbk.)
書誌ID:
BA23997877
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