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Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A. / editors, S.P. Murarka ... [et al.]

資料種別:
図書
出版情報:
Pittsburgh, Pa. : Materials Research Society, c1994
形態:
xiv, 768 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 337 <BA00013775>
著者名:
Murarka, S. P. <DA03701420>  
ISBN:
9781558992375 [1558992375]
書誌ID:
BA24003630
子書誌情報
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