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Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California / Kevin M. Monahan, chairman/editor ; cooperating organizations, Optical Sciences Center/University of Arizona, Institute of Optics/University of Rochester

資料種別:
図書
出版情報:
Bellingham, Wash., USA : SPIE--International Society for Optical Engineering, 1985
形態:
vi, 223 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 565 <BA0022700X>
著者名:
ISBN:
9780892526000 [0892526009] (pbk.)
書誌ID:
BA24008190
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