Micromachining of elements with optical and other submicrometer dimensional and surface specifications : 2-3 April, 1987, The Hague, The Netherlands / M. Weck, chair/editor ; organized by ANRT--Association nationale de la recherche technique, SPIE--the International Society for Optical Engineering ; cooperating sponsors, Comité belge d'optique ... [et al.]

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, c1987

形態:

viii, 159 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 803 <BA0022700X>

著者名:

• Weck, Manfred, 1937- <DA02649085>
• Association nationale de la recherche technique <DA00848590>
• Society of Photo-optical Instrumentation Engineers <DA00848546>
• International Symposium on Optical and Optoelectronic Applied Sciences and Engineering <DA02094151>

ISBN:

9780892528387 [0892528389] (pbk.)

書誌ID:

BA24057083