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Multichamber and in-situ processing of electronic materials : 10-11 October 1989, Santa Clara, California / Robert S. Freund, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

資料種別:
図書
出版情報:
Bellingham, Wash., USA : The Society, c1990
形態:
vi, 196 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1188 <BA0022700X>
著者名:
ISBN:
9780819402240 [0819402249]
書誌ID:
BA24466719
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