Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California | 東京工業大学附属図書館蔵書検索

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Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California / J. Narayan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMATECH [and] Center for Advanced Electronic Materials Processing, North Carolina State University [and] Engineering Research Center for Plasma-Aided Manufacturing, University of Wisconsin-Madison

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, c1990

形態:

vi, 221 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1190 <BA0022700X>

著者名:

ISBN:

9780819402264 [0819402265]

書誌ID:

BA24466898

子書誌情報

フルテキスト

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書誌詳細

注記:	Includes bibliographical references and index
主題:	Annealing of crystals--Congresses; Lasers--Industrial applications--Congresses; Semiconductor industry--Laser use in--Congresses; Semiconductors--Etching--Congresses
言語:	英語

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