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Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A. / editors, Bernard M. Gallois, Woo Y. Lee, Michael A. Pickering

資料種別:
図書
出版情報:
Pittsburgh, Pa. : Materials Research Society, c1995
形態:
xi, 282 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 363 <BA00013775>
著者名:
ISBN:
9781558992641 [1558992642]
書誌ID:
BA24954960
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