Excimer laser materials processing and beam delivery systems : 8-9 November 1990, Boston, Massachusetts | 東京工業大学附属図書館蔵書検索

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Excimer laser materials processing and beam delivery systems : 8-9 November 1990, Boston, Massachusetts / Bernhard P. Piwczyk, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, c1991

形態:

vii, 135 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1377 <BA0022700X>

著者名:

ISBN:

9780819404442 [0819404446]

書誌ID:

BA2576959X

子書誌情報

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書誌詳細

注記:	Includes bibliographical references and index
主題:	Excimer lasers--Congresses
言語:	英語

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