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Selected papers on optical microlithography / Harry L. Stover, editor

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE Optical Engineering Press, c1992
形態:
xviii, 676 p. ; 28 cm
シリーズ名:
SPIE milestone series / Brian J. Thompson, general editor ; v. MS 55 <BA10810973>
著者名:
Stover, Harry L. <DA05507881>  
ISBN:
9780819409850 [0819409855] (: hardbound)
9780819409867 [0819409863] (: softbound)
書誌ID:
BA25780639
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