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Advanced techniques for integrated circuit processing : 1-5 October 1990, Santa Clara, California / James Bondur, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:
図書
出版情報:
Bellingham, Wash., USA : SPIE, c1991
形態:
x, 690 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1392 <BA0022700X>
著者名:
ISBN:
9780819404619 [0819404616]
書誌ID:
BA25824701
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