Advanced techniques for integrated circuit processing : 1-5 October 1990, Santa Clara, California | 東京工業大学附属図書館蔵書検索

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Advanced techniques for integrated circuit processing : 1-5 October 1990, Santa Clara, California / James Bondur, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, c1991

形態:

x, 690 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1392 <BA0022700X>

著者名:

ISBN:

9780819404619 [0819404616]

書誌ID:

BA25824701

子書誌情報

フルテキスト

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書誌詳細

注記:	Includes bibliographical references and indexes
主題:	Integrated circuits--Design and construction--Congresses
言語:	英語

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