Vibration control in microelectronics, optics, and metrology : 4-6 November 1991, San Jose, California | 東京工業大学附属図書館蔵書検索

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Vibration control in microelectronics, optics, and metrology : 4-6 November 1991, San Jose, California / Colin G. Gordon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c1992

形態:

ix, 369 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1619 <BA0022700X>

著者名:

ISBN:

9780819407573 [0819407577]

書誌ID:

BA25850734

子書誌情報

フルテキスト

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所蔵情報

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他の版・巻

書誌詳細

注記:	Includes bibliographical references and index
主題:	Optical instruments--Vibration--Congresses; Vibration--Measurement--Congresses
言語:	英語

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