10th Annual Symposium on Microlithography : proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California | 東京工業大学附属図書館蔵書検索

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10th Annual Symposium on Microlithography : proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California / sponsored by Bacus International

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, c1991

形態:

v, 315 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1496 <BA0022700X>

著者名:

ISBN:

9780819406057 [0819406058]

書誌ID:

BA26148598

子書誌情報

フルテキスト

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所蔵情報

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他の版・巻

書誌詳細

注記:	Includes bibliographical references and index
主題:	Masks (Electronics)--Congresses; Microlithography--Congresses; Semiconductors--Congresses
言語:	英語

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