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Low-dielectric constant materials : synthesis and applications in microelectronics : symposium held April 17-19, 1995, San Francisco, California, U.S.A. / editors, T.-M. Lu ... [et al.]

資料種別:
図書
出版情報:
Pittsburgh, Pa. : Materials Research Society, c1995
形態:
xi, 288 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 381 <BA00013775>
著者名:
Lu, T.-M. (Toh-Ming), 1945-  
ISBN:
9781558992849 [1558992847]
書誌ID:
BA26261943
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