Handbook of critical dimension metrology and process control : proceedings of a conference held 28-29 September 1993, Monterey, California | 東京工業大学附属図書館蔵書検索

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Handbook of critical dimension metrology and process control : proceedings of a conference held 28-29 September 1993, Monterey, California / Kevin M. Monahan, editor

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE Optical Engineering Press, c1994

形態:

x, 358 p. ; 27 cm

シリーズ名:

Critical reviews of optical science and technology ; v. CR52 <BA07938028>

著者名:

ISBN:

9780819413635 [0819413631]

書誌ID:

BA26301618

子書誌情報

フルテキスト

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所蔵情報

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書誌詳細

注記:	Includes bibliographical references
主題:	Electronic industries--Production control--Congresses; Integrated circuits--Measurement--Congresses; Process control--Congresses; Semiconductors--Design and construction--Congresses
言語:	英語

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