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Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California / Cecil J. Davis, Irving P. Herman, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c1992
形態:
ix, 419 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1594 <BA0022700X>
著者名:
ISBN:
9780819407252 [0819407259]
書誌ID:
BA26307002
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