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Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California / Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c1992

形態:

ix, 207 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1595 <BA0022700X>

著者名:

ISBN:

9780819407269 [0819407267]

書誌ID:

BA2630732X

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書誌詳細

注記:	"Part of a two-conference program on Rapid Thermal Processing and Metallization held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991, in San Jose, California"--P. ix Includes bibliographical references and index
主題:	Rapid thermal processing--Congresses; Semiconductor doping--Congresses; Semiconductors--Heat treatment--Congresses; Vapor-plating--Congresses
言語:	英語

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