Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A. | 東京工業大学附属図書館蔵書検索

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Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A. / editors, Steven R. J. Brueck ... [et al.]

資料種別:: 図書
出版情報:: Pittsburgh, PA : Materials Research Society, c1995
形態:: xiii, 454 p. ; 24 cm
シリーズ名:: Materials Research Society symposium proceedings ; v. 387 <BA00013775>
著者名:: Brueck, S. R. J. <DA02469866>
ISBN:: 9781558992900 [1558992901]
書誌ID:: BA26512125

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その他の標題:	Rapid thermal and integrated processing 4 Rapid thermal and integrated processing four
注記:	Includes bibliographical references and indexes
主題:	Chemical vapor deposition--Congresses; Dielectrics--Congresses; Semiconductor doping--Congresses; Semiconductors--Heat treatment--Congresses
言語:	英語

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