Submicrometer metallization : the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California | 東京工業大学附属図書館蔵書検索

>> Google Books

所蔵情報QRコード

Submicrometer metallization : the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California / Thomas Kwok, Takamaro Kikkawa, Krishna Shenai, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c1993

形態:

ix, 344 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1805 <BA0022700X>

著者名:

ISBN:

9780819410030 [0819410039]

書誌ID:

BA26610816

子書誌情報

フルテキスト

Loading contents information

所蔵情報

Loading availability information

他の版・巻

書誌詳細

注記:	Includes bibliographical references and index
主題:	Electrodiffusion--Congresses; Integrated circuits--Design and construction--Congresses; Metallic films--Congresses; Metallizing--Congresses; Semiconductor-metal boundaries--Congresses
言語:	英語

東工大ブックレビュー

Loading review information

類似資料:

1 図書 Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California Toprac, Anthony J., Dang, Kim, Society of Photo-optical Instrumentation Engineers, Electrochemical Society SPIE	7 図書 Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA Design and Process Integration for Microelectronic Manufacturing (Conference), Wong, Alfred Kwok-Kit, Singh, Vivek K., … SPIE
2 電子ブック Submicrometer Metallization: Challenges, Opportunities, and Limitations Kwok SPIE Digital Library Proceedings	8 図書 Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October 1995, Austin, Texas Sabnis, Anant G., Raaijmakers, Ivo J., Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and … SPIE
3 図書 Advanced techniques for integrated circuit processing II : 21-23 September 1992, San Jose, California Bondur, James, Society of Photo-optical Instrumentation Engineers SPIE	9 図書 Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California Davis, Cecil J., Herman, Irving P., Turner, Terry R., Society of Photo-optical Instrumentation Engineers SPIE
4 図書 Metallization : performance and reliability issues for VLSI and ULSI : 12-13 September 1991, San Jose, California Gildenblat, Gennady Sh., Schwartz, Gary P., Society of Photo-optical Instrumentation Engineers SPIE	10 図書 Process, equipment, and materials control in integrated circuit manufacturing III : 1-2 October 1997, Austin, Texas Ghanbari, Abe, Toprac, Anthony J., Society of Photo-optical Instrumentation Engineers SPIE
5 図書 Process, equipment, and materials control in integrated circuit manufacturing IV : 22-24 September, 1998, Santa Clara, California Toprac, Anthony J., Dang, Kim, Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization) SPIE	11 図書 Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas (pbk.) Chen, Fusen E., Murarka, S. P., Society of Photo-optical Instrumentation Engineers SPIE
6 図書 Microelectronics manufacturing and reliability : 21-22 September 1992, San Jose, California Vasquez, Barbara, Society of Photo-optical Instrumentation Engineers SPIE	12 図書 Multilevel interconnect technology III : 22-23 September 1999, Santa Clara, California Graef, Mart, Patel, Divyesh N., Society of Photo-optical Instrumentation Engineers, Electrochemical Society SPIE

1

2

3

4

5

6

7

8

9

10

11

12