Multilevel interconnection : issues that impact competitiveness : 27-28 September 1993, Monterey, California | 東京工業大学附属図書館蔵書検索

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Multilevel interconnection : issues that impact competitiveness : 27-28 September 1993, Monterey, California / Hoang H. Hoang ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, c1993

形態:

vii, 228 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2090 <BA0022700X>

著者名:

ISBN:

9780819413611 [0819413615]

書誌ID:

BA27332060

子書誌情報

フルテキスト

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書誌詳細

注記:	Includes bibliographical references and author index
主題:	Integrated circuits--Very large scale integration--Design and construction--Congresses; Integrated circuits--Very large scale integration--Materials--Congresses; Metallizing--Congresses
言語:	英語

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