Microelectronic processes, sensors, and controls : 27-29 September 1993, Monterey, California | 東京工業大学附属図書館蔵書検索

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Microelectronic processes, sensors, and controls : 27-29 September 1993, Monterey, California / James A. Bondur ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c1994

形態:

viii, 462 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2091 <BA0022700X>

著者名:

書誌ID:

BA27337756

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書誌詳細

注記:	Includes bibliographical references and index
主題:	Integrated circuits--Design and construction--Congresses; Integrated circuits--Heat treatment--Congresses; Optical detectors--Congresses; Plasma etching--Congresses; Semiconductors--Design and construction--Congresses
言語:	英語

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