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Proceedings, the Ninth Annual International Workshop on IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : San Diego, California, USA, February 11-15, 1996 / sponsored by the IEEE Robotics and Automation Society

資料種別:
図書
出版情報:
Piscataway, N.J. : IEEE Service Center, c1996
形態:
xxiv, 528 p. ; 28 cm
著者名:
ISBN:
9780780329850 [0780329856] (: soft)
9780780329867 [0780329864] (: case)
9780780329874 [0780329872] (: micro)
書誌ID:
BA28272769
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