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IEEE/UCS/SEMI International Symposium on Semiconductor Manufacturing, September 17-19, 1995, Austin, TX USA / IEEE/UCS/SEMI International Symposium on Semiconductor Manufacturing ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International ; Ultra Clean Society

資料種別:
図書
出版情報:
Piscataway, NJ : IEEE Service Center, c1995
形態:
ix, 294 p. ; 28 cm
著者名:
ISBN:
9780780329287 [0780329287] (: soft.)
9780780329294 [0780329295] (: case.)
書誌ID:
BA28617135
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