IEEE/UCS/SEMI International Symposium on Semiconductor Manufacturing, September 17-19, 1995, Austin, TX USA

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IEEE/UCS/SEMI International Symposium on Semiconductor Manufacturing, September 17-19, 1995, Austin, TX USA / IEEE/UCS/SEMI International Symposium on Semiconductor Manufacturing ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International ; Ultra Clean Society

資料種別:

図書

出版情報:

Piscataway, NJ : IEEE Service Center, c1995

形態:

ix, 294 p. ; 28 cm

著者名:

ISBN:

9780780329287 [0780329287] (: soft.)
9780780329294 [0780329295] (: case.)

書誌ID:

BA28617135

子書誌情報

フルテキスト

所蔵情報

他の版・巻

書誌詳細

その他の標題:	1995 IEEE International Symposium on Semiconductor Manufacturing 95CB35841 95CH35841 ISSM '95
注記:	Includes bibliographical references "IEEE catalog number 95CH35841"--T.p. verso
言語:	英語

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