Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A. | 東京工業大学附属図書館蔵書検索

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Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A. / editors, J.C. Gelpey ... [et al.]

資料種別:: 図書
出版情報:: Pittsburgh, PA : Materials Research Society, c1996
形態:: xi, 389 p. ; 24 cm
シリーズ名:: Materials Research Society symposium proceedings ; v. 429 <BA00013775>
著者名:: Gelpey, J. C.
ISBN:: 9781558993327 [1558993320]
書誌ID:: BA28964616

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注記:	Includes bibliographical references and indexes
主題:	Chemical vapor deposition--Congresses; Dielectrics--Congresses; Semiconductor doping--Congresses; Semiconductors--Heat treatment--Congresses
言語:	英語

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