| Overview of Optical Diagnostics: Diagnostics vs |
| Sensors vs |
| Transducers |
| Attributes of in Situ Optical Diagnostics |
| Performance Characteristics of Sensors |
| The Need for in Situ Diagnostics |
| Survey of OpticalProbes |
| Survey of Nonoptical Probes |
| Thin Film Processes and Their Diagnostics Needs |
| The Properties of Light: Propagation |
| Imaging |
| Polarization Properties of Light |
| The Structure of Matter: Separation of Electronic and Nuclear Motion |
| EnergyLevels in Atoms, Molecules, and Ions |
| Energy Levels in Solids.The Interactions of Light with Matter for Spectroscopy: Dipole Moments and Polarization |
| Quantum Mechanics of the Interaction of Light with Matter |
| Spectroscopy |
| Nonlinear Optical Interactions |
| Heating by the Probing Laser |
| Diagnostics Equipment and Methods: Optical Components |
| Signal Collection and Analysis |
| Optical Emission Spectroscopy: Mechanisms for Optical Excitation |
| Instrumentation |
| Applications in Processing |
| Plasma Etching |
| Laser-Induced Fluorescence: Experimental Considerations |
| Applications |
| Transmission (Absorption): Experimental Considerations |
| Gas-Phase Absorption |
| Transmission through Adsorbates or Thin Films |
| Transmission through Substrates for Thermometry |
| Reflection: Optics of Reflection |
| Reflectometry, Ellipsometry, and Polarimetry |
| Optical Dielectric Functions |
| Reflection at an Interface with a Semi Infinite Medium |
| Interferometry |
| Photoreflectance |
| Infrared Reflection-Absorption Spectroscopy |
| Differential Reflectometry |
| Surface Photoabsorption and Brewster Angle Reflectometry |
| Reflectance-Difference (Anisotropy) Spectroscopy |
| Ellipsometry |
| Interferometry and Photography: Interferometry |
| Photography, Imaging, and Microscopy |
| Elastic Scattering and Diffraction from Particles and Nonplanar Surfaces (Scatterometry): Detection of Particles |
| Diffraction from Surface Features |
| Speckle Photography and Interferometry |
| Raman Scattering: Kinematics and Dynamics of Spontaneous Raman Scattering |
| Thermometry and Density Measurements in Gases |
| Real-Time Raman Probing of Solids and Surfaces |
| Pyrometry: Theoretical and Experimental Considerations |
| Single-Wavelength Pyrometry |
| Dual-Wavelength Pyrometry |
| Pyrometric Interferometry |
| Thermal Radiation during Pulsed-Laser Deposition |
| Photoluminescence: Experimental Considerations |
| Probing Defects and Damage |
| Thermometry |
| Spectroscopies Employing Laser Heating: Laser-Induced Thermal Desorption |
| Thermal Wave Optical Spectroscopies |
| Nonlinear Optical Diagnostics: Coherent Anti stokes Raman Scattering |
| Surface Second-Harmonic Generation |
| Third-Harmonic Generation in Gases |
| Optical Electron/Ion Probes: Photoionization |
| Photoemission |
| Optogalvanic Spectroscopy |
| Optical Thermometry: The Need for Thermometry in Thin Film Processing |
| Nonoptical Probes of Temperature |
| The Physical Basis of Optical Thermometry |
| Comparison of Optical Thermometry Probes |
| Appendix: Representative Citations in Real-Time Optical Thermometry in Thin Film Processing |
| Reviews of Optical Thermometry |
| Citations for Optical Thermometry in Gases |
| Citations for Optical Thermometry of Wafers |
| Data Analysis and Process Control: Data Acquisition and Analysis |
| Process Modeling |
| Process Control |
| References |
| Subject Index |
| Overview of Optical Diagnostics: Diagnostics vs |
| Sensors vs |
| Transducers |
| Attributes of in Situ Optical Diagnostics |
| Performance Characteristics of Sensors |
| The Need for in Situ Diagnostics |
