Overview of Optical Diagnostics: Diagnostics vs |
Sensors vs |
Transducers |
Attributes of in Situ Optical Diagnostics |
Performance Characteristics of Sensors |
The Need for in Situ Diagnostics |
Survey of OpticalProbes |
Survey of Nonoptical Probes |
Thin Film Processes and Their Diagnostics Needs |
The Properties of Light: Propagation |
Imaging |
Polarization Properties of Light |
The Structure of Matter: Separation of Electronic and Nuclear Motion |
EnergyLevels in Atoms, Molecules, and Ions |
Energy Levels in Solids.The Interactions of Light with Matter for Spectroscopy: Dipole Moments and Polarization |
Quantum Mechanics of the Interaction of Light with Matter |
Spectroscopy |
Nonlinear Optical Interactions |
Heating by the Probing Laser |
Diagnostics Equipment and Methods: Optical Components |
Signal Collection and Analysis |
Optical Emission Spectroscopy: Mechanisms for Optical Excitation |
Instrumentation |
Applications in Processing |
Plasma Etching |
Laser-Induced Fluorescence: Experimental Considerations |
Applications |
Transmission (Absorption): Experimental Considerations |
Gas-Phase Absorption |
Transmission through Adsorbates or Thin Films |
Transmission through Substrates for Thermometry |
Reflection: Optics of Reflection |
Reflectometry, Ellipsometry, and Polarimetry |
Optical Dielectric Functions |
Reflection at an Interface with a Semi Infinite Medium |
Interferometry |
Photoreflectance |
Infrared Reflection-Absorption Spectroscopy |
Differential Reflectometry |
Surface Photoabsorption and Brewster Angle Reflectometry |
Reflectance-Difference (Anisotropy) Spectroscopy |
Ellipsometry |
Interferometry and Photography: Interferometry |
Photography, Imaging, and Microscopy |
Elastic Scattering and Diffraction from Particles and Nonplanar Surfaces (Scatterometry): Detection of Particles |
Diffraction from Surface Features |
Speckle Photography and Interferometry |
Raman Scattering: Kinematics and Dynamics of Spontaneous Raman Scattering |
Thermometry and Density Measurements in Gases |
Real-Time Raman Probing of Solids and Surfaces |
Pyrometry: Theoretical and Experimental Considerations |
Single-Wavelength Pyrometry |
Dual-Wavelength Pyrometry |
Pyrometric Interferometry |
Thermal Radiation during Pulsed-Laser Deposition |
Photoluminescence: Experimental Considerations |
Probing Defects and Damage |
Thermometry |
Spectroscopies Employing Laser Heating: Laser-Induced Thermal Desorption |
Thermal Wave Optical Spectroscopies |
Nonlinear Optical Diagnostics: Coherent Anti stokes Raman Scattering |
Surface Second-Harmonic Generation |
Third-Harmonic Generation in Gases |
Optical Electron/Ion Probes: Photoionization |
Photoemission |
Optogalvanic Spectroscopy |
Optical Thermometry: The Need for Thermometry in Thin Film Processing |
Nonoptical Probes of Temperature |
The Physical Basis of Optical Thermometry |
Comparison of Optical Thermometry Probes |
Appendix: Representative Citations in Real-Time Optical Thermometry in Thin Film Processing |
Reviews of Optical Thermometry |
Citations for Optical Thermometry in Gases |
Citations for Optical Thermometry of Wafers |
Data Analysis and Process Control: Data Acquisition and Analysis |
Process Modeling |
Process Control |
References |
Subject Index |
Overview of Optical Diagnostics: Diagnostics vs |
Sensors vs |
Transducers |
Attributes of in Situ Optical Diagnostics |
Performance Characteristics of Sensors |
The Need for in Situ Diagnostics |