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Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A. / editors, K. N. Tu ... [et al.]

資料種別:
図書
出版情報:
Pittsburgh, Pa. : Materials Research Society, c1996
形態:
xiii, 597 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 427 <BA00013775>
著者名:
Tu, K. N. (King-Ning) <DA01675975>  
ISBN:
9781558993303 [1558993304]
書誌ID:
BA29179226
子書誌情報
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