IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC 96 proceedings, November 11-14, 1996, Cambridge, Massachusetts

所蔵情報QRコード

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC 96 proceedings, November 11-14, 1996, Cambridge, Massachusetts / IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International

資料種別:

図書

出版情報:

Piscataway, NJ : IEEE Service Center, c1996

形態:

vi, 479 p. ; 28 cm

著者名:

ISBN:

9780780333710 [0780333713] (: soft.)
9780780333727 [0780333721] (: case.)

書誌ID:

BA29910565

子書誌情報

フルテキスト

所蔵情報

他の版・巻

書誌詳細

その他の標題:	96CB35953 96CH35953
注記:	Includes bibliographical references "IEEE catalog number 96CH35953" "Theme - Innovation approaches to growth in the semiconductor industry"
主題:	Computer integrated manufacturing systems--Congresses; Electronic industries--Congresses; Semiconductors--Design and construction--Congresses
言語:	英語

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